Journal Article
Journal of Vacuum Science & Technology A, vol. 39, iss. 6, pp. 063213, 2021
Authors
Vaithiyalingam Shutthanandan, Abraham Martinez, Tamas Varga, Arun Devaraj, Swadipta Roy, Elizabeth Stephens, Olga A. Marina, Suntharampillai Thevuthasan, et al.