Journal Article
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 30, iss. 4, pp. 041805, 2012
Authors
Meena S. Rajachidambaram, Tamas Varga, Libor Kovarik, Rahul Sanghavi, Vaithiyalingam Shutthanandan, Suntharampillai Thevuthasan, Seung-Yeol Han, Chih-Hung Chang, et al.