Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 32, iss. 5, pp. 051209, 2014
Authors
Fang Liu, Li Huang, Robert F. Davis, Lisa M. Porter, Daniel K. Schreiber, Satyanarayana V. N. T. Kuchibatla, Vaithiyalingam Shutthanandan, Suntharampillai Thevuthasan, et al.
Samuel H. Payne, Matthew E. Monroe, Christopher C. Overall, Gary R. Kiebel, Michael Degan, Bryson C. Gibbons, Grant M. Fujimoto, Samuel O. Purvine, et al.