Publication - Journal Article Synthesis and characterization of cobalt silicide films on silicon

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 249, iss. 1-2, pp. 532-535, 2006

C.T. Joensson, I.A. Maximov, H.J. Whitlow, V. Shutthanandan, L. Saraf, D.E. McCready, B.W. Arey, Y. Zhang, S. Thevuthasan