Publication - Proceedings Article Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator DOI https://doi.org/10.1117/12.488786 Conference Proceedings SPIE Proceedings, 2003 Authors David E. Dausch, Scott H. Goodwin, Gregory J. Exarhos, Bjorn F. Andresen, Gabor F. Fulop Language English