Publication - Journal Article Behavior of Si and C atoms in ion amorphized SiC

https://doi.org/10.1063/1.2431941
Journal Article
Journal of Applied Physics, vol. 101, iss. 2, pp. 023524, 2007
Authors
W. Jiang, Y. Zhang, M. H. Engelhard, W. J. Weber, G. J. Exarhos, J. Lian, R. C. Ewing
English