Publication - Journal Article Study of hydrogen stability in low-k dielectric films by ion beam techniques

https://doi.org/10.1016/j.nimb.2006.04.022
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 249, iss. 1-2, pp. 335-338, 2006
Authors
Y. Zhang, L. Saraf, V. Shutthanandan, K.D. Hughes, R. Kuan, S. Thevuthasan
English