Journal Article
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 24, iss. 4, pp. 2012, 2006
Authors
T. C. Kaspar, T. Droubay, D. E. McCready, P. Nachimuthu, S. M. Heald, C. M. Wang, A. S. Lea, V. Shutthanandan, S. A. Chambers, M. F. Toney
English