Publication - Journal Article Fabrication of SiO2 microdisk arrays for optics and light trapping experiments DOI https://doi.org/10.1016/j.mee.2007.02.001 Journal Article Microelectronic Engineering, vol. 84, iss. 12, pp. 2799-2803, 2007 Authors L.V. Saraf, M.H. Engelhard, A.S. Lea Language English
