Publication - Journal Article Effects of dynamic recovery on amorphization kinetics in 6H-SiC

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 266, iss. 12-13, pp. 2793-2796, 2008

William J. Weber, Lumin Wang, Yanwen Zhang, Weilin Jiang, In-Tae Bae