Publication - Journal Article Damage evolution in GaN under MeV heavy ion implantation

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, iss. 6, pp. 2342, 2009

Yuan Gao, Jianming Xue, Dongzheng Zhang, Zilong Wang, Chune Lan, Sha Yan, Yugang Wang, Fujun Xu, Bo Shen, Yanwen Zhang