Journal Article
Journal of Micromechanics and Microengineering, vol. 17, iss. 9, pp. S250-S256, 2007
Authors
Richard B Peterson, Brian K Paul, Todd Palmer, Qiao Wu, William Jost, Chih-Heng T Tseng, Santosh Tiwari, Gertrude Patello, Edgar C Buck, Jamelyn D Holladay, Rick Shimskey, Paul Humble, Paul MacFarlan, Jesse Wainright
English