Publication - Journal Article As-Received,

Ozone Cleaned and Ar+ Sputtered Surfaces of Hafnium Oxide Grown by Atomic Layer

Deposition and Studied by XPS

https://doi.org/10.1116/11.20100601
Journal Article
Surface Science Spectra, vol. 18, iss. 1, pp. 46-57, 2012
Authors
Mark Engelhard, Jacob Herman, Robert Wallace, Don Baer
English