Publication - Journal Article Site-specific Pt deposition and etching on electrically and thermally isolated SiO2micro-disk surfaces DOI https://doi.org/10.1088/0960-1317/20/4/045031 Journal Article Journal of Micromechanics and Microengineering, vol. 20, iss. 4, pp. 045031, 2010 Authors Laxmikant V Saraf Language English
