Publication - Journal Article Direct measurement of oxygen incorporation into thin film oxides at room temperature upon ultraviolet photon irradiation

https://doi.org/10.1063/1.3058691
Journal Article
Applied Physics Letters, vol. 93, iss. 26, pp. 263109, 2008
Authors
Masaru Tsuchiya, Vaithiyalingam Shutthanandan, Mark H. Engelhard, Shriram Ramanathan
English