Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography

Journal Article
Advanced Materials, vol. 23, iss. 3, pp. 414-420, 2010
Authors
Hyun Wook Ro, Vera Popova, Lei Chen, Aaron M. Forster, Yifu Ding, Kyle J. Alvine, Dave J. Krug, Richard M. Laine, Christopher L. Soles
English