Publication - Journal Article Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

https://doi.org/10.1016/j.apsusc.2010.09.072
Journal Article
Applied Surface Science, vol. 257, iss. 6, pp. 2197-2202, 2011
Authors
B. Aguirre, R.S. Vemuri, D. Zubia, M.H. Engelhard, V. Shutthananadan, K. Kamala Bharathi, C.V. Ramana
English