Publication - Journal Article Swelling or erosion on the surface of patterned GaN damaged by heavy ion implantation

https://doi.org/10.1016/j.nimb.2010.05.090
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 268, iss. 19, pp. 3207-3210, 2010
Authors
Yuan Gao, Chune Lan, Jianming Xue, Sha Yan, Yugang Wang, Fujun Xu, Bo Shen, Yanwen Zhang
English