Publication - Journal Article Realization of critical distance during the interplay between re-deposition and secondary sputtering from milling of angular side wall with a focused ion beam

https://doi.org/10.1016/j.nimb.2011.04.111
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 269, iss. 13, pp. 1540-1547, 2011
Authors
Laxmikant V. Saraf
English