Publication - Journal Article Synthesis and characterization of inorganic silicon oxycarbide glass thin films by reactive rf-magnetron sputtering DOI https://doi.org/10.1116/1.2404688 Journal Article Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 25, iss. 1, pp. 153-159, 2007 Authors Joseph V. Ryan, C. G. Pantano Language English
