Three-dimensional quantitative chemical roughness of buried ZrO2/In2O3 interfaces via energy-filtered electron tomography

Journal Article
Applied Physics Letters, vol. 100, iss. 10, pp. 101604, 2012
Authors
X. Y. Zhong, B. Kabius, D. K. Schreiber, J. A. Eastman, D. D. Fong, A. K. Petford-Long
English