Publication - Journal Article Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors

https://doi.org/10.1109/jmems.2013.2239258
Journal Article
Journal of Microelectromechanical Systems, vol. 22, iss. 3, pp. 670-677, 2013
Authors
Jonathan D. Suter, Cameron J. Hohimer, Jacob M. Fricke, Josef Christ, Hanseup Kim, Allan T. Evans
English