Journal Article
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 34, iss. 3, pp. 03H106, 2016
Authors
David Willingham, Benjamin E. Naes, Patrick G. Heasler, Mindy M. Zimmer, Christopher A. Barrett, R. Shane Addleman
English