Publication - Journal Article Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al₂O₃ on silicon

Journal Article

Journal of Vacuum Science & Technology B, vol. 36, iss. 6, pp. 062902, 2018

Authors

Dhruv Shah, Dhananjay I. Patel, Tuhin Roychowdhury, G. Bruce Rayner, Noel O’Toole, Donald R. Baer, Matthew R. Linford

Language English

Publication - Journal Article Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon