Publication - Journal Article Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy

Journal Article

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 34, iss. 4, pp. 041510, 2016

Authors

Fang Liu, Li Huang, Lisa M. Porter, Robert F. Davis, Daniel K. Schreiber

Language English