Publication - Journal Article In situ and ex situ investigation of ion-beam-induced amorphization in α-SiC

https://doi.org/10.1016/s0168-583x(96)00883-x
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 127-128, pp. 191-194, 1997
Authors
W.J. Weber, N. Yu
English