Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 141, iss. 1-4, pp. 398-403, 1998
Authors
T Hartmann, L.M Wang, W.J Weber, N Yu, K.E Sickafus, J.N Mitchell, C.J Wetteland, M.A Nastasi, M.G Hollander, N.P Baker, C.R Evans, J.R Tesmer, C.J Maggiore
English