Publication - Journal Article Modification of SRIM-calculated dose and injected ion profiles due to sputtering, injected ion buildup and void swelling

Journal Article

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 387, pp. 20-28, 2016

Authors

Jing Wang, Mychailo B. Toloczko, Nathan Bailey, Frank A. Garner, Jonathan Gigax, Lin Shao

Language English