Amorphization resistance of nanocrystalline 3C-SiC implanted with H2+ ions

Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 493, pp. 9-14, 2021
Authors
Limin Zhang, Chenglong Pan, Weilin Jiang, Lei Wang, Xuan Meng, Liang Chen
English