Publication - Journal Article Thermally grownSi3N4thin films on Si(100): Surface and interfacial composition DOI https://doi.org/10.1103/physrevb.47.15622 Journal Article Physical Review B, vol. 47, iss. 23, pp. 15622-15629, 1993 Authors C. H. F. Peden, J. W. Rogers, N. D. Shinn, K. B. Kidd, K. L. Tsang Language English
