Journal Article
Journal of Vacuum Science & Technology A, vol. 39, iss. 6, pp. 063213, 2021
Authors
Vaithiyalingam Shutthanandan, Abraham Martinez, Tamas Varga, Arun Devaraj, Swadipta Roy, Elizabeth Stephens, Olga A. Marina, Suntharampillai Thevuthasan, Vijayakumar Murugesan, Vineet Joshi
English